Загрязнение - это процесс или действие, вызывающее загрязнение материалов или поверхностей загрязняющими веществами.. Есть две широкие категории поверхностных загрязнителей.: тип пленки и частицы. Эти загрязнения могут вызвать «смертельный дефект» в миниатюрной цепи.. Film contaminants of only 10 nm (nanometers) can drastically reduce coating adhesion on a wafer or chip. It is widely accepted that particles of 0.5 microns or larger are the target. Однако, some industries are now targeting smaller particles.
A partial list of contaminants is found below. Any of these can be the source for killing a circuit. Preventing these contaminants from entering the cleanroom environment is the objective. It requires a commitment by everyone entering the cleanroom to make it happen. Professional cleaning personnel need to be aware of the importance of controlling contaminants. Strict procedures should be followed whenever entering or cleaning a cleanroom. Compromise is not acceptable when cleaning in a cleanroom.
Sources of Contamination
This is a partial list of some of the commonly known contaminants that can cause problems in some cleanroom environments. It has been found that many of these contaminants generate from five basic sources. The facilities, people, tools, fluids and the product manufactures can all contribute to contamination. Review this list to gain a better understanding of where contamination originates.
1.Facilities
Walls, floors and ceilings
Paint and coatings
Construction material (sheet rock, saw dust etc.)
Air conditioning debris
Room air and vapors
Spills and leaks
2.People
Skin flakes and oil
Cosmetics and perfume
Spittle Clothing debris (lint, fibers etc.)
Hair
3.Tool Generated
Friction and wear particles
Lubricants and emissions
Vibrations
Brooms, mops and dusters
4.Fluids
Particulates floating in air
Bacteria, organics and moisture
Floor finishes or coatings
Cleaning chemicals
Plasticizers (outgasses)
Deionized water
5.Product generated
Silicon chips
Quartz flakes
Clean room debris
Aluminum particles